Publication:
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
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1878 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-15
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Statistics
Views
1878 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-15
Citations