Browsing by author "Caner, Oezge"

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Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Wu, Meiyi; de Marneffe, Jean-Francois; Opsomer, Karl; Detavernier, Christophe; Delabie, Annelies; Naujok, Philipp; Caner, Oezge; Goodyear, Andy; Cooke, Mike; Saadeh, Qais; Soltwisch, Victor; Scholze, Frank; Philipsen, Vicky (2021)