Publication:

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Date

2021
Journal article
https://doi.org/10.1016/j.mne.2021.100089
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Characterization_of_Ru4-xTax__x___1_2_3__alloy_as_material_candidate_for_EUV_low-n_mask 10.04 MB

Author(s)

Wu, Meiyi  
;
de Marneffe, Jean-Francois  
;
Opsomer, Karl  
;
Detavernier, Christophe
;
Delabie, Annelies  
;
Naujok, Philipp
;
Caner, Oezge
;
Goodyear, Andy
;
Cooke, Mike
;
Saadeh, Qais
;
Soltwisch, Victor
;
Scholze, Frank
;
Philipsen, Vicky  

Journal

MICRO AND NANO ENGINEERING

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