Browsing by author "Tabata, Toshiyuki"
Now showing items 1-5 of 5
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3D simulation for melt laser anneal integration in FinFET's contact
Tabata, Toshiyuki; Curvers, Benoit; Huet, Karim; Chew, Soon Aik; Everaert, Jean-Luc; Horiguchi, Naoto (2020) -
Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
Huang, Yan-Hua; Porret, Clément; Hikavyy, Andriy; Rengo, Gianluca; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Kohen, David; Margetis, Joe; Tolle, John; Mazzamuto, Fulvio; Tabata, Toshiyuki; Heyns, Marc; Loo, Roger (2019) -
Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Lu, Lu; Jourdan, Nicolas; Daubriac, Richard; Tabata, Toshiyuki; Roze, Fabien; Thuries, Louis; Cristiano, Fuccio; Tokei, Zsolt (2023) -
Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equillibrium solidification
Tabata, Toshiyuki; Raynal, Pierre-Edouard; Huet, Karim; Everaert, Jean-Luc (2020) -
UV nanosecond laser annealing for Ru interconnects
Jourdan, Nicolas; Roze, Fabien; Tabata, Toshiyuki; Lariviere, Stephane; Contino, Antonino; Mazzamuto, Fulvio; Tokei, Zsolt (2020)