Authors

Tabata, Toshiyuki; Raynal, Pierre-Edouard; Huet, Karim; Everaert, Jean-Luc

DOI

10.1063/5.0005176

ISSN

0021-8979

Issue

13

Journal

Journal of Applied Physics

Volume

127

Title

Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equillibrium solidification

Publication type

Journal article