Publication:
Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equillibrium solidification
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1954 since deposited on 2021-10-29
Acq. date: 2025-10-23
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Metrics
Views
1954 since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations