3D simulation for melt laser anneal integration in FinFET's contact

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Authors

Tabata, Toshiyuki; Curvers, Benoit; Huet, Karim; Chew, Soon Aik; Everaert, Jean-Luc; Horiguchi, Naoto

ISSN

2168-6734

Journal

IEEE Journal of the Electron Devices Society

Volume

8

Title

3D simulation for melt laser anneal integration in FinFET's contact

Publication type

Journal article

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