Publication:
3D simulation for melt laser anneal integration in FinFET's contact
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2136 since deposited on 2021-10-29
3last month
1last week
Acq. date: 2025-12-09
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Metrics
Views
2136 since deposited on 2021-10-29
3last month
1last week
Acq. date: 2025-12-09
Citations