Browsing by author "Ein Eli, Yair"
Now showing items 1-3 of 3
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Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
Tamir, Magi; Vaes, Jan; Ein Eli, Yair (2008) -
Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry
Nagar, Magi; Vaes, Jan; Ein Eli, Yair (2008) -
K-sorbate as a passivator in copper chemical mechanical planarization (CMP) slurries
Nagar, Magi; Vaes, Jan; Ein Eli, Yair (2008)