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Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry
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1934 since deposited on 2021-10-17
Acq. date: 2026-02-24
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Statistics
Views
1934 since deposited on 2021-10-17
Acq. date: 2026-02-24
Citations