Browsing by author "Alix, Cheryl"

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Controlled isotropic etches for Gate-All-Around (GAA) device architectures

Muraki, Yusuke; Oniki, Yusuke; Kenis, Karine; Altamirano Sanchez, Efrain; Holsteyns, Frank; Kal, Subhadeep; Alix, Cheryl; Kumar, Kaushik; Mosden, Aelan (2020)