Controlled isotropic etches for Gate-All-Around (GAA) device architectures

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Authors
Muraki, Yusuke; Oniki, Yusuke; Kenis, Karine; Altamirano Sanchez, Efrain; Holsteyns, Frank; Kal, Subhadeep; Alix, Cheryl; Kumar, Kaushik; Mosden, Aelan
Conference
Surface Preparation and Cleaning Conference - SPCC
Title
Controlled isotropic etches for Gate-All-Around (GAA) device architectures
Publication type
Oral presentation
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