Publication:
Controlled isotropic etches for Gate-All-Around (GAA) device architectures
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2213 since deposited on 2021-10-29
6last month
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Acq. date: 2026-01-11
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Views
2213 since deposited on 2021-10-29
6last month
1last week
Acq. date: 2026-01-11
Citations