Browsing by author "Van Setten, E."

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Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.; de kruif, R.; Fukugami, N.; Kondo, S.; Philipsen, Vicky; Van Setten, E.; Connolly, B.; Lammers, A.; Vaenkatesan, V.; Zimmerman, J.; Harned, N. (2012)
Separable models for computational lithography

Liu, Hua-Yu; Zhao, Q.; Chen, J.F.; Jiang, J.; Socha, B.; Van Setten, E.; Engelen, A.; Meessen, J.; Crouse, M.M.; Feng, M.; Shao, W.; Cao, H.; Cao, Y.; Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Finders, Jo (2008)