Browsing by author "Uchida, Ryusuke"
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Newly developed positive-tone resists for Posi/Posi double patterning process
Nakamura, Tsuyoshi; Takeshita, Masaru; Maemori, Satoshi; Uchida, Ryusuke; Takasu, Ryoichi; Ohmori, Katsumi (2009)