Browsing by author "Han, Yang"
Now showing items 1-3 of 3
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Aspect ratio independent Plasma etching for silicon STI
Han, Yang; Zhang, Liping; Altamirano Sanchez, Efrain (2019) -
Enabling backside processing for perforated microfluidic devices
Visker, Jakob; Han, Yang; Visker, Evert; Dang Thi Thuy, Chi; Gocyla, Mateusz; Humbert, Aurelie; Ackaert, Jan; Peng, Lan; Vanhaelemeersch, Serge (2023) -
Investigation on Low-temperature Temporary Bonding for Microfluidic Devices in Lifescience Applications
Han, Yang; Dang Thi Thuy, Chi; Visker, Evert; Visker, Jakob; Humbert, Aurelie; Peng, Lan (2021)