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Enabling backside processing for perforated microfluidic devices
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Authors
Visker, Jakob
;
Han, Yang
;
Visker, Evert
;
Dang Thi Thuy, Chi
;
Gocyla, Mateusz
;
Humbert, Aurelie
;
Ackaert, Jan
;
Peng, Lan
;
Vanhaelemeersch, Serge
DOI
10.1109/ECTC51909.2023.00216
EISBN
979-8-3503-3498-2
ISSN
0569-5503
Conference
IEEE 73rd Electronic Components and Technology Conference (ECTC)
Journal
na
Title
Enabling backside processing for perforated microfluidic devices
Publication type
Proceedings paper
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Summary
2
20.500.12860/42911.2
*
2023-12-18T11:27:14Z
validation by library/open access desk
1
20.500.12860/42911
2023-10-23T17:27:27Z
*Selected version
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