Browsing by author "Seidel, Dirk"

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Phame: phase measurements on 45nm node phase shift features

Buttgereit, Ute; Birkner, Robert; Seidel, Dirk; Perlitz, Sacha; Philipsen, Vicky; De Bisschop, Peter (2008)
Phase behavior through pitch and duty cycle and its impact on process window

Buttgereit, Ute; Birkner, Robert; Seidel, Dirk; Perlitz, Sacha; Philipsen, Vicky; De Bisschop, Peter (2009)