Browsing by author "Chen, Weidong"

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RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity

Chen, Weidong; Dhayagude, T.; Chaparala, P.; Demirlioglu, E.; Shenasa, M.; Bearda, Twan; Arnauts, Sophia; Meuris, Marc (1997)