RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity

Thumbnail
View/open
Metadata
Show full item record
Authors
Chen, Weidong; Dhayagude, T.; Chaparala, P.; Demirlioglu, E.; Shenasa, M.; Bearda, Twan; Arnauts, Sophia; Meuris, Marc
Conference
Science and Technology of Semiconductor Surface Preparation
Title
RCA and IMEC/SC2 clean: metallic immunity and gate oxide integrity
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections