Browsing by author "Tillocher, T"
Now showing items 1-2 of 2
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A novel low temperature etch approach to reduce ULK plasma damage
Zhang, Liping; de Marneffe, Jean-Francois; Leroy, F.; Ljazouli, R.; Lefaucheux, P.; Tillocher, T; Dussart, R.; Maekawa, K.; Yatsuda, K.; Dussarrat, C.; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
Leroy, F; Tillocher, T; Zhang, Liping; Girard, A.; Cardinaud, C.; Lefaucheux, P.; de Marneffe, Jean-Francois; Dussart, R.; Maekawa, K; Yatsuda, K; Baklanov, Mikhaïl (2015)