Browsing by author "DeLuca, James"
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Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, James; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2011)