Authors

Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, James; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc

ISSN

0013-4651

Issue

2

Journal

Journal of the Electrochemical Society

Volume

158

Title

Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent

Publication type

Journal article