Browsing by author "Gianni, Giai Gischia"
Now showing items 1-3 of 3
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A new perspective of barrier material evaluation and process optimization
Zhao, Larry; Tokei, Zsolt; Gianni, Giai Gischia; Volders, Henny; Beyer, Gerald (2009) -
A novel test structure to study intrinsic reliability of barrier/low-k
Zhao, Larry; Tokei, Zsolt; Gianni, Giai Gischia; Pantouvaki, Marianna; Croes, Kristof; Beyer, Gerald (2009) -
Study of leakage mechanism and trap density in porous low-k materials
Gianni, Giai Gischia; Croes, Kristof; Groeseneken, Guido; Tokei, Zsolt; Afanasiev, Valeri; Zhao, Larry (2010)