Study of leakage mechanism and trap density in porous low-k materials

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Authors
Gianni, Giai Gischia; Croes, Kristof; Groeseneken, Guido; Tokei, Zsolt; Afanasiev, Valeri; Zhao, Larry
Conference
48th Annual IEEE International Reliability Physics Symposium - IRPS
Title
Study of leakage mechanism and trap density in porous low-k materials
Publication type
Proceedings paper
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