Browsing by author "Joa, Gaehun"

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Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Joa, Gaehun; Edinger, Pierre; Bleiker, Simon J.; Wang, Xiaojing; Takabayashi, Alain Yuji; Sattari, Hamed; Quack, Niels; Jezzini, Moises; Verheyen, Peter; Stemme, Goran; Bogaerts, Wim; Gylfason, Kristinn B.; Niklaus, Frank (2021)