Publication:

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2582975
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 906.36 KB

Author(s)

Joa, Gaehun
;
Edinger, Pierre
;
Bleiker, Simon J.
;
Wang, Xiaojing
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Quack, Niels
;
Jezzini, Moises
;
Verheyen, Peter
;
Stemme, Goran
;
Bogaerts, Wim  
;
Gylfason, Kristinn B.
;
Niklaus, Frank

Journal

na

Abstract

Description

Statistics

Downloads

241 since deposited on 2022-03-16
11last month
3last week
Acq. date: 2026-02-25

Views

1852 since deposited on 2022-03-16
Acq. date: 2026-02-25

Citations

Statistics

Downloads

241 since deposited on 2022-03-16
11last month
3last week
Acq. date: 2026-02-25

Views

1852 since deposited on 2022-03-16
Acq. date: 2026-02-25

Citations