Browsing by author "Reuter, Christian"
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Reducing EUV mask 3D effects by alternative metal absorbers
Philipsen, Vicky; Luong, Vu; Souriau, Laurent; Erdmann, Andreas; Xu, Dongbo; Evanschitzky, Peter; Van de Kruijs, Robbert; Edrisi, Arash; Scholze, Frank; Laubis, Christian; Irmscher, Mathias; Naasz, Sandra; Reuter, Christian; Hendrickx, Eric (2017) -
Single element and metal alloy novel EUV mask absorbers for improved imaging
Philipsen, Vicky; Luong, Vu; Souriau, Laurent; Altamirano Sanchez, Efrain; Adelmann, Christoph; Hendrickx, Eric; Scholze, Frank; Laubis, Christian; Kruemberg, Jens; Reuter, Christian (2017)