Browsing by author "Malhouitre, Stéphane"
Now showing items 1-3 of 3
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A new ultra-low K ILD material based on organic-inorganic hybrid resins
Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002) -
Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's
Iacopi, Francesca; Tokei, Zsolt; Shamiryan, Denis; Le, Quoc Toan; Malhouitre, Stéphane; Van Hove, Marleen; Maex, Karen (2002) -
Single damascene integration of porous zirkonTM version 1 low-k dielectric films
Malhouitre, Stéphane; Jehoul, Christiane; Van Aelst, Joke; Struyf, Herbert; Brongersma, Sywert; Carbonell, Laure; Vos, Ingrid; Beyer, Gerald; Van Hove, Marleen; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2003-11)