A new ultra-low K ILD material based on organic-inorganic hybrid resins

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Authors
Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen
Conference
Silicon Materials - Processing, Characterization, and Reliability
Title
A new ultra-low K ILD material based on organic-inorganic hybrid resins
Publication type
Proceedings paper
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