Publication:

A new ultra-low K ILD material based on organic-inorganic hybrid resins

Date

2002
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorZhong, Ben
dc.contributor.authorMeynen, Herman
dc.contributor.authorIacopi, Francesca
dc.contributor.authorWeidner, Ken
dc.contributor.authorMalhouitre, Stéphane
dc.contributor.authorMoyer, Eric
dc.contributor.authorBargeron, Cory
dc.contributor.authorSchalk, Paul
dc.contributor.authorPeck, Alan
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T00:15:45Z
dc.date.available2021-10-15T00:15:45Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7110
dc.source.beginpageB12.4
dc.source.conferenceSilicon Materials - Processing, Characterization, and Reliability
dc.source.conferencedate1/04/2002
dc.source.conferencelocationSan Francisco, CA USA
dc.title

A new ultra-low K ILD material based on organic-inorganic hybrid resins

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions