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A new ultra-low K ILD material based on organic-inorganic hybrid resins
Publication:
A new ultra-low K ILD material based on organic-inorganic hybrid resins
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhong, Ben
;
Meynen, Herman
;
Iacopi, Francesca
;
Weidner, Ken
;
Malhouitre, Stéphane
;
Moyer, Eric
;
Bargeron, Cory
;
Schalk, Paul
;
Peck, Alan
;
Van Hove, Marleen
;
Maex, Karen
Journal
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1940
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1940
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations