Browsing by author "Turovets, I."

Now showing items 1-2 of 2

300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials

Moussa, Alain; Bogdanowicz, Janusz; Groven, Benjamin; Morin, Pierre; Beggiato, Matteo; Saib, Mohamed; Santoro, G.; Abramovitz, Y.; Houchens, K.; Ben Nissim, S.; Meir, N.; Hung, J.; Urbanowicz, A.; Koret, R.; Turovets, I.; Lorusso, Gian; Charley, Anne-Laure (2023)
CD metrology for EUV lithography and etch

Johanesen, H.; Kenslea, A.; Williamson, M.; Knowles, M.; Kwakman, L.; Levi, S.; Nishry, N.; Adan, O.; Englard, I.; Van Puymbroeck, Jan; Felder, Dan; Gov, S.; Cohen, O.; Turovets, I. (2015)