Browsing by author "Soltwisch, V."

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High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments

Soltwisch, V.; Glabisch, S.; Andrle, A.; Philipsen, Vicky; Saadeh, Q.; Schroder, S.; Lohr, L.; Ciesielski, R.; Brose, S. (2022)
Refined extreme ultraviolet mask stack model

Makhotkin, Igor; Wu, Meiyi; Soltwisch, V.; Scholze, F.; Philipsen, Vicky (2021)