EISBN
978-1-5106-6050-2
ISBN
978-1-5106-6049-6
ISSN
0277-786X
Conference
37th European Mask and Lithography Conference
Journal
Proceedings of SPIE
Volume
12472
Title
High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments
Publication type
Proceedings paper