Browsing by author "Don, Eric"
Now showing items 1-3 of 3
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Control of laser induced interface traps with in-line corona charge metrology
Everaert, Jean-Luc; Rosseel, Erik; Ortolland, Claude; Aoulaiche, Marc; Hoffmann, Thomas Y.; Pavelka, Tibor; Don, Eric (2008) -
Monitoring plasma nitridation of HfSiOx by corona charge measurements
Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc; Rosseel, Erik; Pavelka, Tibor; Don, Eric; Vanhaelemeersch, Serge (2007) -
Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes
Huyghebaert, Cedric; Bearda, Twan; Rosseel, Erik; Everaert, Jean-Luc; Don, Eric; Pavelka, Tibor (2008)