Authors

Everaert, Jean-Luc; Rosseel, Erik; Ortolland, Claude; Aoulaiche, Marc; Hoffmann, Thomas Y.; Pavelka, Tibor; Don, Eric

Conference

16th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP

Title

Control of laser induced interface traps with in-line corona charge metrology

Publication type

Proceedings paper