Browsing by author "Vaes, Jan"
Now showing items 21-27 of 27
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Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry
Nagar, Magi; Starosvetsky, David; Vaes, Jan; Ein-Eli, Yair (2010) -
Process dependence on defectivity count on copper and dielectric surfaces in post-copper CMP cleaning
Daviot, Jerome; Vaes, Jan (2008) -
SLIM-cut thin silicon wafering with enhanced crack and stress control
Vaes, Jan; Masolin, Alex; Pesquera Rodriguez, Amaia; Dross, Frederic (2010) -
The influence of barrier slurry selectivity on the design window for copper CMP
Kim, Hoyouny; Vaes, Jan; Li, Yunlong; Leunissen, Peter (2008) -
Thermal curing of crystallographic defects on a SLIM-cut silicon foil
Masolin, Alex; Vaes, Jan; Dross, Frederic; Poortmans, Jef; Mertens, Robert (2010) -
Three novel ways of making thin-film crystalline-silicon layers on glass for solar cell applications
Gordon, Ivan; Dross, Frederic; Depauw, Valerie; Masolin, Alex; Qiu, Yu; Vaes, Jan; Van Gestel, Dries; Poortmans, Jef (2011) -
Wafer thinning and planarization tech-nology for 3D Interconnects
Vaes, Jan; Cotrin Teixeira, Ricardo; Swinnen, Bart (2008)