Authors

Nagar, Magi; Starosvetsky, David; Vaes, Jan; Ein-Eli, Yair

ISSN

0013-4686

Issue

10

Journal

Electrochimica Acta

Volume

55

Title

Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry

Publication type

Journal article