Publication:
Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry
Date
| dc.contributor.author | Nagar, Magi | |
| dc.contributor.author | Starosvetsky, David | |
| dc.contributor.author | Vaes, Jan | |
| dc.contributor.author | Ein-Eli, Yair | |
| dc.date.accessioned | 2021-10-18T19:27:40Z | |
| dc.date.available | 2021-10-18T19:27:40Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0013-4686 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17678 | |
| dc.source.beginpage | 3560 | |
| dc.source.endpage | 3571 | |
| dc.source.issue | 10 | |
| dc.source.journal | Electrochimica Acta | |
| dc.source.volume | 55 | |
| dc.title | Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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