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Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistry
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1942 since deposited on 2021-10-18
3last month
Acq. date: 2025-12-10
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Metrics
Views
1942 since deposited on 2021-10-18
3last month
Acq. date: 2025-12-10
Citations