Browsing by author "Simone, A."

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HF etching mechanisms of advanced low-k films

Verdonck, Patrick; Le, Quoc Toan; Krishtab, Mikhail; Vanstreels, Kris; Armini, Silvia; Simone, A.; Nguyen, Mai Phuong; Van Elshocht, Sven; Baklanov, Mikhaïl (2014)