Authors

Verdonck, Patrick; Le, Quoc Toan; Krishtab, Mikhail; Vanstreels, Kris; Armini, Silvia; Simone, A.; Nguyen, Mai Phuong; Van Elshocht, Sven; Baklanov, Mikhaïl

Conference

IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC

Title

HF etching mechanisms of advanced low-k films

Publication type

Proceedings paper

Embargo date

9999-12-31