Publication:

HF etching mechanisms of advanced low-k films

Date

2014
Proceedings Paper
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Author(s)

Verdonck, Patrick  
;
Le, Quoc Toan  
;
Krishtab, Mikhail  
;
Vanstreels, Kris  
;
Armini, Silvia  
;
Simone, A.
;
Nguyen, Mai Phuong
;
Van Elshocht, Sven  
;
Baklanov, Mikhaïl

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