Browsing by author "Singh, R."
Now showing items 1-1 of 1
-
Use of surfactants for improved particle performance of dHF-based cleaning recipes
Vos, Rita; Xu, Kaidong; Lux, Marcel; Fyen, Wim; Singh, R.; Chen, Zhi Yong; Mertens, Paul; Hatcher, Z.; Heyns, Marc (2001)