Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Use of surfactants for improved particle performance of dHF-based cleaning recipes
View/
open
5856.pdf (212.4Kb)
Metadata
Show full item record
Authors
Vos, Rita
;
Xu, Kaidong
;
Lux, Marcel
;
Fyen, Wim
;
Singh, R.
;
Chen, Zhi Yong
;
Mertens, Paul
;
Hatcher, Z.
;
Heyns, Marc
Conference
Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
Title
Use of surfactants for improved particle performance of dHF-based cleaning recipes
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login