Browsing by author "Fried, D."

Now showing items 1-1 of 1

Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Guissi, Sofiane; Clark, William; Juncker, Aurélie; Ervin, J.; Greiner, K.; Fried, D.; Briggs, Basoene; Devriendt, Katia; Sebaai, Farid; Charley, Anne-Laure; Wilson, Chris; Boemmels, Juergen; Tokei, Zsolt (2017)