Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Guissi, Sofiane; Clark, William; Juncker, Aurélie; Ervin, J.; Greiner, K.; Fried, D.; Briggs, Basoene; Devriendt, Katia; Sebaai, Farid; Charley, Anne-Laure; Wilson, Chris; Boemmels, Juergen; Tokei, Zsolt

Publication:

Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

35824.pdf 722.13 KB

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

Metrics

2 since deposited on 2021-10-24

Acq. date: 2025-12-11

1975 since deposited on 2021-10-24

3last month

1last week

Acq. date: 2025-12-11

Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Date

Files

Author(s)

Journal

Abstract

Description

Metrics

Downloads

Views

Citations

Metrics

Downloads

Views

Citations