Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Guissi, Sofiane; Clark, William; Juncker, Aurélie; Ervin, J.; Greiner, K.; Fried, D.; Briggs, Basoene; Devriendt, Katia; Sebaai, Farid; Charley, Anne-Laure; Wilson, Chris; Boemmels, Juergen; Tokei, Zsolt

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Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

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2017

Proceedings Paper

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Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

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