Browsing by author "Stapelmann, Chris"

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On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon

Giles, Luis Felipe; Stapelmann, Chris; Cerva, Hans; Jahnel, Franz; Demeurisse, Caroline; Vrancken, Christa; Hoffmann, Thomas Y. (2008)
Stress memorization technique – fundamental understanding and low-cost integration for advanced CMOS technology using a nonselective process

Ortolland, Claude; Okuno, Yasutoshi; Verheyen, Peter; Kerner, Christoph; Stapelmann, Chris; Aoulaiche, Marc; Horiguchi, Naoto; Hoffmann, Thomas Y. (2009)