Authors

Ortolland, Claude; Okuno, Yasutoshi; Verheyen, Peter; Kerner, Christoph; Stapelmann, Chris; Aoulaiche, Marc; Horiguchi, Naoto; Hoffmann, Thomas Y.

ISSN

0018-9383

Issue

8

Journal

IEEE Transactions on Electron Devices

Volume

56

Title

Stress memorization technique – fundamental understanding and low-cost integration for advanced CMOS technology using a nonselective process

Publication type

Journal article